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Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
| Title: | Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor | Authors: | Todorović, D. M.; Cretin, B.; Song, Y.Q.; Smiljanić, Milče   ; Lazić, Žarko ; Radulović, Katarina |
Issue Date: | 2008 | Publication: | 26th International Conference on Microelectronics, Proceedings, MIEL 2008 | Type: | Conference Paper | Collation: | str. 325-328 | DOI: | 10.1109/ICMEL.2008.4559287 | WoS-ID: | 000257432600066 | Scopus-ID: | 2-s2.0-51749108877 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/468 https://enauka.gov.rs/handle/123456789/134336 |
M-category: | Mp. category will be shown later |
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