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eNauka >  Results >  Investigation of silicon anisotropic etching in alkaline solutions with propanol addition
Title: Investigation of silicon anisotropic etching in alkaline solutions with propanol addition
Authors: Jović, Vesna; Lamovec, Jelena  ; Popović, Mirjana
Issue Date: 2008
Publication: 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
ISSN: 2159-1660 Search Idenfier
Publisher: Institute of Electrical and Electronics Engineers Inc.
Type: Conference Paper
Collation: str. 355-358
DOI: 10.1109/ICMEL.2008.4559295
WoS-ID: 000257432600073
Scopus-ID: 2-s2.0-51749098774
URI: https://cer.ihtm.bg.ac.rs/handle/123456789/423
https://enauka.gov.rs/handle/123456789/134400
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