Nano-structured TiN thin films deposited by single ion beam reactive sputtering

Bogdanov, Žarko; Popovic, N.; Zlatanovic, M.; Goncić, Bratislav; Rakočević, Zlatko Lj.; Zec, Slavica

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Title:	Nano-structured TiN thin films deposited by single ion beam reactive sputtering
Authors:	Bogdanov, Žarko ; Popovic, N.; Zlatanovic, M.; Goncić, Bratislav; Rakočević, Zlatko Lj. ; Zec, Slavica
Issue Date:	2007
Publication:	Materials Science Forum
ISSN:	0255-5476 Materials Science Forum Search Idenfier
Type:	Conference Paper
Collation:	vol. 555 str. 303-+
WoS-ID:	000249653700049
VBS COBISS:	32263183
URI:	http://vbs.rs/scripts/cobiss?command=DISPLAY&base=70036&RID=32263183 https://vinar.vin.bg.ac.rs/handle/123456789/6692 https://plus.cobiss.net/cobiss/sr/sr/bib/32263183#izum.si https://enauka.gov.rs/handle/123456789/147818
Project:	Dobijanje i karakterizacija površina nanostrukturnih materijala (RS-141001)
M-category:	Mp. category will be shown later

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