On the hydrocarbon kinetics in dust producing symmetrically driven rf plasmas

Juergen Roepcke; Dmitry Lopatik; Brankica Sikimic; Frank Hempel; Marc Boeke; Stefanović, Ilija M.; Nader Sadeghi; Jörg Winter

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Title :	On the hydrocarbon kinetics in dust producing symmetrically driven rf plasmas
Authors:	Juergen Roepcke; Dmitry Lopatik; Brankica Sikimic; Frank Hempel; Marc Boeke; Stefanović, Ilija M. ; Nader Sadeghi; Jörg Winter
Issue Date:	2010
Publication:	63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, October 4–8, 2010; Paris, France, Bulletin of the American Physical Society
Publisher:	American Physical Society
Type:	Conference Paper
Collation:	str. Abstract ID: BAPS.2010.GEC.CTP.43
URI:	https://enauka.gov.rs/handle/123456789/159911
URL:	http://meetings.aps.org/link/BAPS.2010.GEC.CTP.43
Metadata source:	Migrirano iz RIS podataka
M-category:	Mp. category will be shown later

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