Results
| Title: | ECR Plasma Etching Characterization using a Retarding Field Energy Analyzer | Authors: | Milosavljević, Vladimir   ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels |
Issue Date: | 2012 | Publication: | The AVS 59th International Symposium and Exhibition, Tampa, Florida, USA | Publisher: | SAD | Type: | Conference Paper | Collation: | str. PS1-WeA1.192-PS1-WeA1.192 | URI: | https://enauka.gov.rs/handle/123456789/165782 | URL: | http://www2.avs.org/symposium/AVS59/pages/info.html | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
Google ScholarTM
Items in eNauka are protected by copyright, with all rights reserved, unless otherwise indicated.