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Title: Wafer-level printing process of organic MEMS resonators
Authors: Dubourg, Georges  ; Dufour, Isabelle; Pellet, Claude; Ayela, Cédric
Issue Date: 2012
Publication: E-MRS Spring Meeting 2012, 14-18 May, Strasbourg, France
Publisher: France : Materials Research Society
Type: Conference Paper
Collation: str. 1-1
URI: https://enauka.gov.rs/handle/123456789/171688
Metadata source: Migrirano iz RIS podataka
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