Low-energy broad-beam sputter deposition of TiNx thin films

Goncić, Bratislav; Popovic, N; Bogdanov, Žarko; Zec, Slavica; Zlatanovic, M

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Title:	Low-energy broad-beam sputter deposition of TiNx thin films
Authors:	Goncić, Bratislav; Popovic, N; Bogdanov, Žarko ; Zec, Slavica ; Zlatanovic, M
Issue Date:	2003
Publication:	Materials Science Forum
ISSN:	0255-5476 Materials Science Forum Search Idenfier
Type:	Article
Collation:	vol. 413 str. 159-164
WoS-ID:	000180730700028
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/6350 https://enauka.gov.rs/handle/123456789/200674
M-category:	22M22

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