Monitoring of hydrocarbon concentrations in dust-producing RF plasmas

Hempel, F; Lopatik, D; Sikimic, B; Stefanović, Ilija; Winter, J; Röpcke, J

Results

eNauka > Results > Monitoring of hydrocarbon concentrations in dust-producing RF plasmas

Title:	Monitoring of hydrocarbon concentrations in dust-producing RF plasmas
Authors:	Hempel, F; Lopatik, D; Sikimic, B; Stefanović, Ilija ; Winter, J; Röpcke, J
Issue Date:	2012
Publication:	Plasma Sources Science and Technology
ISSN:	0963-0252 Plasma Sources Science and Technology Search Idenfier
Type:	Article
Collation:	vol. 21 br. 5 str. 055001-055001
DOI:	10.1088/0963-0252/21/5/055001
WoS-ID:	000309590200004
Scopus-ID:	2-s2.0-84866342615
URI:	https://enauka.gov.rs/handle/123456789/204624
Metadata source:	Migrirano iz RIS podataka
M-category:	21M21

16
SCOPUS^TM

15
OpenCitations

16
WEB OF SCIENCE^TM

Altmetric

Dimensions

Find the DOI

Finding a DOI in CrossRef based on publication meta-data. The DOI (and metadata) with the similar data match will be displayed. ATTENTION - it doesn't have to be that publication.

Unpaywall