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Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers
| Title: | Characterization of PDMS membranes fabricated by bulkmicromachining on silicon wafers | Authors: | Jović, Vesna; Đinović, Zoran; Radovanović, Filip; Starčević, Marko; Lamovec, Jelena   ; Smiljanić, Milče ; Lazić, Žarko |
Issue Date: | 2014 | Publication: | 6th International Scientific Conference on Defensive Technologies, OTEH 2014, Belgrade, 09-10 October 2014: Proceedings | Publisher: | Belgrade : Military Technical Institute | Type: | Conference Paper | Collation: | str. 674-679 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/2605 https://enauka.gov.rs/handle/123456789/233829 http://dais.sanu.ac.rs/123456789/785 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) Integrated Microsystems Austria GmbH, Wiener Neustadt, Österreich – Austrian Center for Medical Inovation and Technology, Phase Change Actuator (PCA) for Steering Catheter (INP 103-PCA) |
M-category: | Mp. category will be shown later |
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