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| Title: | Plasma damage of low-k dielectric materials | Authors: | Milosavljević, Vladimir M.   ; E. Gudimenko; C. Hayden; S. Daniels |
Issue Date: | 2010 | Publication: | The 37th IOP Annual Conference on Plasma Physics | Publisher: | IOP, Windermere, UK | Type: | Conference Paper | Collation: | str. 53-54 | URI: | https://enauka.gov.rs/handle/123456789/253421 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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