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Ion implantation induced structural changes in reactively sputtered Cr-N layers on Si substrates
| Title: | Ion implantation induced structural changes in reactively sputtered Cr-N layers on Si substrates | Authors: | Novaković, Mirjana M. |
Issue Date: | 2007 | Publication: | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms | ISSN: | 0168-583X Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier |
Type: | Article | Collation: | vol. 257 br. 1-2 str. 782-785 | DOI: | 10.1016/j.nimb.2007.01.112 | WoS-ID: | 000246165500176 | Scopus-ID: | 2-s2.0-33947714857 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/6656 https://enauka.gov.rs/handle/123456789/266685 |
M-category: | 21M21 |
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