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eNauka >  Rezultati >  The Implementation of the Surface Charging Effects in Three-Dimensional Simulations of SiO<sub>2</sub> Etching Profile Evolution
Title: The Implementation of the Surface Charging Effects in Three-Dimensional Simulations of SiO<sub>2</sub> Etching Profile Evolution
Authors: Rađenović, Branislav  ; Radmilović-Rađenović, Marija  
Issue Date: 2014
Publication: Engineering
ISSN: 1947-3931 Search Idenfier
Type: Article
Collation: vol. 06 br. 01 str. 1-6
DOI : 10.4236/eng.2014.61001
URI: https://enauka.gov.rs/handle/123456789/298090
Metadata source: Migrirano iz RIS podataka
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