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Structural and Optical Characterization of TiN Thin Films Implanted with High Vanadium Fluences
| Title: | Structural and Optical Characterization of TiN Thin Films Implanted with High Vanadium Fluences | Authors: | Popović, Maja Č.   ; Novaković, Mirjana M. ; Maksić, Aleksandar D. ; Bibić, Nataša M. |
Issue Date: | 2014 | Publication: | 27th Summer School and International Symposium on the Physics of Ionized Gases, Beograd | Type: | Conference Paper | URI: | https://enauka.gov.rs/handle/123456789/311012 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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