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eNauka >  Results >  Collective fabrication of all-organic microcantilever chips based on a hierarchical combination of shadow-masking and wafer-bonding processing methods
Title: Collective fabrication of all-organic microcantilever chips based on a hierarchical combination of shadow-masking and wafer-bonding processing methods
Authors: Dubourg, Georges  ; Fadel-Taris, Ludivine; Dufour, Isabelle; Pellet, Claude; Ayela, Cédric
Issue Date: 2011
Publication: Journal of Micromechanics and Microengineering
ISSN: 0960-1317 Journal of Micromechanics and Microengineering Search Idenfier
Publisher: Institute of Physics Publishing
Type: Article
Collation: vol. 21 br. 9 str. 095021-095021
DOI: 10.1088/0960-1317/21/9/095021
WoS-ID: 000294774900021
Scopus-ID: 2-s2.0-80052243989
URI: https://enauka.gov.rs/handle/123456789/359618
Metadata source: Migrirano iz RIS podataka
M-category: 
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