Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices

Horia-Eugen, Porteanu; Stefanović, Ilija M.; Michael Klute; Ralf-Peter Brinkmann; Peter Awakowicz; Wolfgang Heinrich

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Title:	Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
Authors:	Horia-Eugen, Porteanu; Stefanović, Ilija M. ; Michael Klute; Ralf-Peter Brinkmann; Peter Awakowicz; Wolfgang Heinrich
Issue Date:	2019
Publication:	Proceedings of PPPS 2019
Publisher:	IEEE, Orlando, Florida, USA
Type:	Conference Paper
URI:	https://enauka.gov.rs/handle/123456789/440578
URL:	https://ieeexplore.ieee.org/document/9009698
Metadata source:	Migrirano iz RIS podataka
M-category:	Mp. category will be shown later

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