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TiN thin films deposited by ion beam sputtering: effects of energetic particles bombardment
| Title: | TiN thin films deposited by ion beam sputtering: effects of energetic particles bombardment | Authors: | Popovic, N; Bogdanov, Žarko   ; Goncić, Bratislav; Zec, Slavica ; Rakočević, Zlatko Lj. ; Zlatanovic, M; Peruško, Davor |
Issue Date: | 2004 | Publication: | Thin Solid Films | ISSN: | 0040-6090 Thin Solid Films Search Idenfier |
Type: | Article | Collation: | vol. 459 br. 1-2 str. 286-291 | DOI: | 10.1016/j.tsf.2003.12.130 | WoS-ID: | 000222217100065 | Scopus-ID: | 2-s2.0-2942534391 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/6452 https://enauka.gov.rs/handle/123456789/470227 |
M-category: | 21M21 |
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