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Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration
| Title: | Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration | Authors: | Zlatanovic, M; Popovic, N; Bogdanov, Žarko |
Issue Date: | 1998 | Publication: | Thin Solid Films | ISSN: | 0040-6090 Thin Solid Films Search Idenfier |
Type: | Article | Collation: | vol. 317 br. 1-2 str. 463-467 | DOI: | 10.1016/S0040-6090(97)00557-9 | WoS-ID: | 000074517700112 | Scopus-ID: | 2-s2.0-0032051002 | URI: | https://enauka.gov.rs/handle/123456789/470288 https://vinar.vin.bg.ac.rs/handle/123456789/6235 |
M-category: | 21M21 |
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