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eNauka >  Results >  Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration
Title: Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration
Authors: Zlatanovic, M; Popovic, N; Bogdanov, Žarko  ; Belosevac, R; Kunosic, A; Goncić, Bratislav
Issue Date: 1998
Publication: Thin Solid Films
ISSN: 0040-6090 Thin Solid Films Search Idenfier
Type: Article
Collation: vol. 317 br. 1-2 str. 463-467
DOI: 10.1016/S0040-6090(97)00557-9
WoS-ID: 000074517700112
Scopus-ID: 2-s2.0-0032051002
URI: https://enauka.gov.rs/handle/123456789/470288
https://vinar.vin.bg.ac.rs/handle/123456789/6235
M-category: 
21M21

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