Simple and rapid method to fabricate organic microcantilevers based on a sacrificial layer technique

Dubourg, Georges; Fadel-Taris, Ludivine; Dufour, Isabelle; Plano, Bernard; Haupt, Karsten; Ayela, Cedric

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Title:	Simple and rapid method to fabricate organic microcantilevers based on a sacrificial layer technique
Authors:	Dubourg, Georges ; Fadel-Taris, Ludivine; Dufour, Isabelle; Plano, Bernard; Haupt, Karsten; Ayela, Cedric
Issue Date:	2010
Publication:	36th International Conference on Micro-and Nano-Engineering (MNE), 19-22 September, Genova, Italy
Type:	Conference Paper
Collation:	str. 1-1
URI:	https://enauka.gov.rs/handle/123456789/523565
Metadata source:	Migrirano iz RIS podataka
M-category:	Mp. category will be shown later

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