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Ion beam modification of structural and electrical properties of TiN thin films
| Naziv: | Ion beam modification of structural and electrical properties of TiN thin films | Autori: | Popović, Maja   ; Stojanović, Milan; Peruško, Davor ; Novaković, Mirjana M. ; Radović, Ivan ; Milinović, Velimir; Timotijevic, B.; Mitrić, Miodrag ; Milosavljević, Momir |
Godina: | 2008 | Publikacija: | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms | ISSN: | 0168-583X Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Pretraži identifikator |
Tip rezultata: | Naučni članak | Kolacija: | vol. 266 br. 10 str. 2507-2510 | DOI: | 10.1016/j.nimb.2008.03.032 | WoS-ID: | 000257185600094 | Scopus-ID: | 2-s2.0-44649108220 | URI: | https://enauka.gov.rs/handle/123456789/549594 https://vinar.vin.bg.ac.rs/handle/123456789/6769 |
M-kategorija: | 21M21 - Vodeći međunarodni časopis kategorije M21 |
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