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The dynamics of pulsed reactive CCP discharges in response to thin film deposition and dust formation
| Title: | The dynamics of pulsed reactive CCP discharges in response to thin film deposition and dust formation | Authors: | Brankica Sikimić; Stefanović, Ilija M. |
Issue Date: | 2012 | Publication: | DPG Tagung 2012 DPG Verhandlungen | Publisher: | Deutsche Physikalische Gesellschaft e.V., Stuttgart Germany | Type: | Conference Paper | Collation: | str. P 23.3 | URI: | https://enauka.gov.rs/handle/123456789/555378 | URL: | http://www.dpg-verhandlungen.de/year/2012/conference/stuttgart/part/p/session/23/contribution/3 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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