Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation

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Title:	Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation
Authors:	Gaković, Biljana M. ; Kudryashov, S. I.; Danilov, P. A.; Milovanović, D. ; Panjan, Peter; Bezhanov, S. G.; Uryupin, S. A.; Ionin, A. A.
Issue Date:	2021
Publication:	Applied Optics
ISSN:	2155-3165 Applied Optics Search Idenfier
Type:	Article
Collation:	vol. 60 br. 31 str. H12-H12
DOI:	10.1364/AO.432691
WoS-ID:	000717500300002
Scopus-ID:	2-s2.0-85117900177
PMID:	34807148
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/10012 https://riofh.iofh.bg.ac.rs/handle/123456789/770 https://enauka.gov.rs/handle/123456789/573217
Project:	Ministarstvo prosvete, nauke i tehnološkog razvoja Republike Srbije, Ugovor br. 200051 (Institut za opštu i fizičku hemiju, Beograd) Ministarstvo prosvete, nauke i tehnološkog razvoja Republike Srbije, Ugovor br. 200017 (Univerzitet u Beogradu, Institut za nuklearne nauke Vinča, Beograd-Vinča) COST [TUMIEE CA17126] STSM [CA17126-45334]
M-category:	22M22

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