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| Title: | Creation of silicon submicron structures by compression plasma flow action | Authors: | Purić, Jagoš  ; Astashynski, Valentin M.; Dojčinović, Ivan  ; Kuraica, Milorad |
Issue Date: | 2004 | Publication: | Vacuum | ISSN: | 0042-207X Vacuum Search Idenfier |
Type: | Conference Paper | Collation: | vol. 73 br. 3-4 str. 561-566 | DOI: | 10.1016/j.vacuum.2003.12.087 | WoS-ID: | 000220928900037 | Scopus-ID: | 2-s2.0-1842582444 | URI: | https://physrep.ff.bg.ac.rs/handle/123456789/317 https://enauka.gov.rs/handle/123456789/606621 |
M-category: | Mp. category will be shown later |
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