Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence

Results

Title:	Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence
Authors:	Erich, Marko ; Gloginjić, Marko ; Mravik, Željko ; Vrban, Branislav; Čerba, Štefan; Lüley, Jakub; Nečas, Vladimír; Filová, Vendula; Katovský, Karel; Štastný, Ondrej; Petrović, Srđan M. ;
Issue Date:	2023
Publication:	27th International Conference on Applied Physics of Condensed Matter : APCOM 2022 : the book of abstracts; June 22 - 24; Strbske Pleso, Slovak Republic
ISSN:	0094-243X AIP Conference Proceedings Search Idenfier
Type:	Conference Paper
Collation:	vol. 2778 br. 1 str. 060002
DOI:	10.1063/5.0136670
WoS-ID:	001055613400055
Scopus-ID:	2-s2.0-85160274951
URI:	https://vinar.vin.bg.ac.rs/handle/123456789/11068 https://enauka.gov.rs/handle/123456789/762425
M-category:	Mp. category will be shown later

Altmetric

Dimensions

Unpaywall

Google Scholar^TM