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Influence of the deposition parameters on the resistivity of TiN prepared by the IBAD method
| Title: | Influence of the deposition parameters on the resistivity of TiN prepared by the IBAD method | Authors: | Milinović, V.; Milosavljević, M.; Peruško, Davor |
Issue Date: | 2002 | Publication: | SPIG 2002 : 21st Summer School and International Symposium on the Physics of Ionized Gases : Contributed papers & abstracts of invited lectures, topical invited lectures, progress reports and workshop lectures | Publisher: | Niš : University of Niš, Faculty of Sciences and Mathematics - Department of Physics | Type: | Conference Paper | ISBN: | 86-83481-07-7 Search Idenfier |
Collation: | str. 246-249 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/12850 https://enauka.gov.rs/handle/123456789/894321 |
M-category: | Mp. category will be shown later |
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