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Title: Influence of the deposition parameters on the resistivity of TiN prepared by the IBAD method
Authors: Milinović, V.; Milosavljević, M.; Peruško, Davor  ; Radović, Ivan  ; Bibić, Nataša
Issue Date: 2002
Publication: SPIG 2002 : 21st Summer School and International Symposium on the Physics of Ionized Gases : Contributed papers & abstracts of invited lectures, topical invited lectures, progress reports and workshop lectures
Publisher: Niš : University of Niš, Faculty of Sciences and Mathematics - Department of Physics
Type: Conference Paper
ISBN: 86-83481-07-7 Search Idenfier
Collation: str. 246-249
URI: https://vinar.vin.bg.ac.rs/handle/123456789/12850
https://enauka.gov.rs/handle/123456789/894321
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