Browsing eNauka
Browsing by Author Miyauchi, M
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2007 | Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma | Miyauchi, M; Miyoshi, Y; Petrovic, Zoran Lj   ; Makabe, Toshiaki | Article | 21M21 |