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Browsing by Author Takeo, Y
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2000 | Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma | Kitajima, T; Takeo, Y; Petrovic, Zoran Lj   ; Makabe, Toshiaki | Article | 21a+M21a+ |