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Browsing by Project The Integrated Microsystems Austria, IMA GmbH

Showing results 1 to 1 of 1
Issue DateTitleAuthor(s)TypeМp-cat.
2008Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometryĐinović, Zoran ; Tomić, Miloš  ; Manojlović, Lazo ; Lazić, Žarko  ; Smiljanić, Milče M.  Book parts
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