Browsing eNauka
Browsing by Project The Integrated Microsystems Austria, IMA GmbH
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2008 | Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry![]() | Đinović, Zoran | Book parts | Mp. category will be shown later |
