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Browsing by Author Ellingboe, A. R.
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2007 | Characterization of the pulse plasma source | Milosavljević, Vladimir   ; Karkari, S. K.; Ellingboe, A. R. | Article | 21M21 |
| 2011 | Influence of plasma chemistry on oxygen triplets | Milosavljević, Vladimir ; Ellingboe, A. R.; Daniels, S. | Article | 22M22 |
| 2006 | Measured Stark widths and shifts of the neutral argon spectral lines in 4s-4p and 4s-4p′ transitions | Milosavljević, Vladimir ; Ellingboe, A. R.; Djeniže, S. | Article | 21aM21a |
| 2008 | Real-time plasma control in a dual-frequency, confined plasma etcher | Milosavljević, Vladimir ; Ellingboe, A. R.; Gaman, C.; Ringwood, J. V. | Article | 21M21 |