еНаука - преглед
Преглед према Аутор M. B. Hopkins
Приказ резултата 1 до 3 од 3
| Година | Наслов | Аутор(и) | Тип резултата | Мп-кат. |
|---|---|---|---|---|
| 2011 | Characterization of an ECR Etching Reactor using a Retarding Field Energy Analyzer | Milosavljević, Vladimir   ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2011 | Characterization of atomic oxygen emission by PROES and Ion-flux measurement in an ECR plasma etcher | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | ECR Plasma Etching Characterization using a Retarding Field Energy Analyzer | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |