Browsing eNauka
Browsing by Author MacGearailt, Niall
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2013 | Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher | Milosavljević, Vladimir   ; MacGearailt, Niall; Cullen, P. J.; Daniels, Stephen; Turner, Miles M. | Article | 21M21 |