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Browsing by Author Miyoshi, Y
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2004 | Functional separation in two frequency operation of an inductively coupled plasma | Denda, T; Miyoshi, Y; Komukai, Y; Goto, T; Petrovic, Zoran Lj   ; Makabe, Toshiaki | Article | 21aM21a |
| 2002 | Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures | Miyoshi, Y; Petrovic, Zoran Lj ; Makabe, Toshiaki | Article | 21M21 |
| 2007 | Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma | Miyauchi, M; Miyoshi, Y; Petrovic, Zoran Lj ; Makabe, Toshiaki | Article | 21M21 |
| 2002 | Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography | Miyoshi, Y; Petrovic, Zoran Lj ; Makabe, Toshiaki | Article | 22M22 |