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Browsing by Author N. Macgarailt
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2011 | Characterization of an ECR Etching Reactor using a Retarding Field Energy Analyzer | Milosavljević, Vladimir   ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2011 | Characterization of atomic oxygen emission by PROES and Ion-flux measurement in an ECR plasma etcher | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | ECR Plasma Etching Characterization using a Retarding Field Energy Analyzer | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | Spatial and Time Resolved Optical Emission Spectroscopy of an ECR Plasma Etcher | Milosavljević, Vladimir ; N. Macgarailt; S. Daniels | Conference Paper | Mp. category will be shown later |