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Browsing by Author Turner, Miles M.
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| Issue Date | Title | Author(s) | Type | М-cat. |
|---|---|---|---|---|
| 2013 | Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher | Milosavljević, Vladimir   ; MacGearailt, Niall; Cullen, P. J.; Daniels, Stephen; Turner, Miles M. | Article | 21M21 |