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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2025 | Characterisation of SiOx thin films deposited by remote high density atomic oxygen plasma source | Stefanović, Ilija   ; Awakowicz, Peter; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf-Peter | Conference Paper | Mp. category will be shown later |
| 2019 | Correlated mode analysis of a microwave driven ICP source | Porteanu, Horia-Eugen; Stefanović, Ilija ; Bibinov, Nikita; Klute, Michael; Awakowicz, Peter; Brinkmann, Ralf Peter; Heinrich, Wolfgang | Article | 21aM21a |
| 2018 | Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow | Stefanović, Ilija ; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf-Peter; Awakowicz, Peter | Article | 21aM21a |