Browsing eNauka
Browsing by Project TESLA, Ministry of Science and Environmental Protection
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2007 | 3D Etching profile evolution simulations: Time dependence analysis of the profile charging during SiO2 etching in plasma | Radjenovic, Branislav   ; Radmilovic-Radjenovic, Marija | Conference Paper | Mp. category will be shown later |