Browsing eNauka
Browsing by Project TESLA, Ministry of Science and Environmental Protection
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2007 | 3D Etching profile evolution simulations: Time dependence analysis of the profile charging during SiO2 etching in plasma | Radjenovic, Branislav   ; Radmilovic-Radjenovic, Marija | Конференцијски рад | Мп категорија ће бити приказана накнадно. |