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Browsing by Author Chernysh, Vladimir S.

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Issue DateTitleAuthor(s)TypeМp-cat.
2019Influence of the Charge State of Xenon Ions on the Depth Distribution Profile Upon Implantation into SiliconBalakshin, Yu. V.; Kozhemiako, A. V.; Petrović, Srđan M.  ; Erich, Marko  ; Shemukhin, Andrey A.; Chernysh, Vladimir S.Naučni članak
23M23 - Međunarodni časopis kategorije M23