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Browsing by Author Ringwood, J. V.
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2008 | Real-time plasma control in a dual-frequency, confined plasma etcher | Milosavljević, Vladimir   ; Ellingboe, A. R.; Gaman, C.; Ringwood, J. V. | Article | 21M21 |