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Browsing by Author S. Kechkar
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2011 | Radical oxygen estimation and control in reactive ion etch plasma | Milosavljević, Vladimir   ; S. Daniels; A. Cowley; Y. Zhang; S. Kechkar; E. Gudimenko; B. Keville; J. Conway; M. M. Turner | Conference Paper | Mp. category will be shown later |