Browsing eNauka
Browsing by Project Ministry of Science and Environmental Protection of Serbia [141025]
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| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2008 | Dynamics of the profile charging during SiO2 etching in plasma for high aspect ratio trenches | Radjenovic, Branislav M   ; Radmilovic-Radjenovic, Marija D ; Petrovic, Zoran Lj | Article | 22M22 |