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Browsing by Project Ministry of Science and Environmental Protection of Serbia [141025]

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Issue DateTitleAuthor(s)TypeМp-cat.
2008Dynamics of the profile charging during SiO2 etching in plasma for high aspect ratio trenchesRadjenovic, Branislav M  ; Radmilovic-Radjenovic, Marija D  ; Petrovic, Zoran Lj  Article
22M22