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Electrical and optical characteristics of Ta2O5 thin films deposited by electron-beam vapor deposition
| Title: | Electrical and optical characteristics of Ta2O5 thin films deposited by electron-beam vapor deposition | Authors: | Todorova, Z; Donkov, N; Ristić, Zoran   ; Bundaleski, Nenad ; Petrović, Suzana ; Petkov, M |
Issue Date: | 2006 | Publication: | Plasma Processes and Polymers | ISSN: | 1612-8850 Plasma Processes and Polymers Search Idenfier |
Type: | Article | Collation: | vol. 3 br. 2 str. 174-178 | DOI: | 10.1002/ppap.200500110 | WoS-ID: | 000235628300014 | Scopus-ID: | 2-s2.0-33644527901 | VBS COBISS: | 1026776757 | URI: | https://enauka.gov.rs/handle/123456789/122573 https://vinar.vin.bg.ac.rs/handle/123456789/6568 |
M-category: | 21aM21a |
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