Measurements of atomic oxygen concentrations in a large scale asymmetric capacitively coupled plasma reactor by using catalytic probes

Lazović, Saša; Malović, Gordana; Petrović, Zoran; Puač, Nevena; Spasić, Kosta; U. Cvelbar; M. Mozetič

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Title:	Measurements of atomic oxygen concentrations in a large scale asymmetric capacitively coupled plasma reactor by using catalytic probes
Authors:	Lazović, Saša ; Malović, Gordana ; Petrović, Zoran ; Puač, Nevena ; Spasić, Kosta ; U. Cvelbar; M. Mozetič
Issue Date:	2011
Publication:	30th ICPIG
Publisher:	Belfast, Northern Ireland
Type:	Conference Paper
Collation:	str. B6-359-1-B6-359-3
URI:	https://enauka.gov.rs/handle/123456789/131509
Metadata source:	Migrirano iz RIS podataka
M-category:	Mp. category will be shown later

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