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Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer
| Title: | Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer | Authors: | Dubourg, Georges |
Issue Date: | 2012 | Publication: | Sensors and Actuators B: Chemical | ISSN: | 0925-4005 Sensors and Actuators B: Chemical Search Idenfier |
Type: | Article | Collation: | vol. 169 str. 320-326 | DOI: | 10.1016/j.snb.2012.04.088 | WoS-ID: | 000305719600045 | Scopus-ID: | 2-s2.0-84861904515 | URI: | https://enauka.gov.rs/handle/123456789/133479 | Metadata source: | Migrirano iz RIS podataka | M-category: | 21a+M21a+ |
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