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Title: Power Consumption in Miniature Microwave Inductively Coupled Plasma Source
Authors: Stefanović, Ilija M.  ; Michael Klute; Ralf-Peter Brinkmann; Nikita Bibinov; Horia-Eugen Porteanu; Wolfgang Heinrich; Peter Awakowicz
Issue Date: 2019
Publication: Technical Program Abstract Book
Publisher: IEEE, Orlando, Florida, USA
Type: Conference Paper
URI: https://enauka.gov.rs/handle/123456789/136371
URL: https://indico.cern.ch/event/727938/
Metadata source: Migrirano iz RIS podataka
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