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Simulation and experimental study of maskless convex corner compensation in TMAH water solution
| Title: | Simulation and experimental study of maskless convex corner compensation in TMAH water solution | Authors: | Smiljanić, Milče   ; Radjenovic, Branislav ; Radmilović-Radjenović, Marija ; Lazić, Žarko ; Jović, Vesna |
Issue Date: | 2014 | Publication: | Journal of Micromechanics and Microengineering | ISSN: | 0960-1317 Journal of Micromechanics and Microengineering Search Idenfier |
Publisher: | Bristol : Iop Publishing Ltd | Type: | Article | Collation: | vol. 24 br. 11 str. 115003-115003 | DOI: | 10.1088/0960-1317/24/11/115003 | WoS-ID: | 000345262800003 | Scopus-ID: | 2-s2.0-84914680395 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/1426 https://enauka.gov.rs/handle/123456789/148916 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) Fundamentalni procesi i primene transporta čestica u neravnotežnim plazmama, trapovima i nanostrukturama (RS-171037) |
M-category: | 21M21 |
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