Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption

Đurić, Zoran G.; Jokić, Ivana; Djukic, Maja M.; Frantlović, Miloš

Results

eNauka > Results > Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption

Title:	Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption
Authors:	Đurić, Zoran G. ; Jokić, Ivana ; Djukic, Maja M.; Frantlović, Miloš
Issue Date:	2010
Publication:	Microelectronic Engineering
ISSN:	0167-9317 Microelectronic Engineering Search Idenfier
Publisher:	Elsevier
Type:	Article
Collation:	vol. 87 br. 5-8 str. 1181-1184
DOI:	10.1016/j.mee.2009.12.039
WoS-ID:	000276300700124
Scopus-ID:	2-s2.0-77049097119
URI:	https://cer.ihtm.bg.ac.rs/handle/123456789/733 https://enauka.gov.rs/handle/123456789/155961
Project:	Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
M-category:	21M21

10
SCOPUS^TM

8
OpenCitations

9
WEB OF SCIENCE^TM

Altmetric

Dimensions

Find the DOI

Finding a DOI in CrossRef based on publication meta-data. The DOI (and metadata) with the similar data match will be displayed. ATTENTION - it doesn't have to be that publication.

Unpaywall