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A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors
| Title: | A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors | Authors: | Poljak, Predrag   ; Frantlović, Miloš ; Smiljanić, Milče ; Lazić, Žarko ; Jokić, Ivana ; Randjelović, Danijela ; Mitrovic, Zoran |
Issue Date: | 2017 | Publication: | Proceedings of the International Semiconductor Conference, CAS | ISSN: | 1545-827X  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | Collation: | str. 237-240 | DOI: | 10.1109/SMICND.2017.8101211 | WoS-ID: | 000425844500051 | Scopus-ID: | 2-s2.0-85040532623 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/2117 https://redun.educons.edu.rs/handle/123456789/293 https://enauka.gov.rs/handle/123456789/170663 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) Merenja u konceptu ""pametne"" distributivne mreže (RS-32019) |
M-category: | Mp. category will be shown later |
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