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Title: Atomic oxygen concentrations in a large scale asymmetric capacitively coupled plasma reactor
Authors: Lazović, Saša  ; Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  ; U. Cvelbar; M. Mozetič
Issue Date: 2011
Publication: 3rd Workshop on Radio Frequency Discharges
Publisher: Dublin, Ireland
Type: Conference Paper
Collation: str. 55-55
URI: https://enauka.gov.rs/handle/123456789/173539
Metadata source: Migrirano iz RIS podataka
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