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| Title: | Mechanical Characterization of MEMS Materials | Authors: | Stanimirović, Zdravko   ; Stanimirović, Ivanka |
Issue Date: | 2012 | Publication: | MIEL : 28th International Conference on Microelectronics : Proceedings book | ISSN: | 2159-1660  Search Idenfier |
Type: | Conference Paper | ISBN: | 978-1-4673-0237-1 Search Idenfier |
Collation: | str. 177-179 | DOI: | 10.1109/miel.2012.6222827 | WoS-ID: | 000309119600036 | Scopus-ID: | 2-s2.0-84864237928 | URI: | https://enauka.gov.rs/handle/123456789/190926 | Metadata source: | Migracija | Availability note: | Пуни текст није доступан ни у електронској, ни у штампаној форми | M-category: | Mp. category will be shown later |
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