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Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si
| Title: | Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si Izrada mikrogredica od SiO2 anizotropnim hemijskim nagrizanjem na monokristalnom silicijumu (100) orijentacije |
Authors: | Jović, Vesna; Lamovec, Jelena   ; Popović, Mirjana; Lazić, Žarko |
Issue Date: | 2007 | Publication: | Journal of the Serbian Chemical Society | ISSN: | 0352-5139 Journal of the Serbian Chemical Society Search Idenfier |
Publisher: | Serbian Chemical Society | Type: | Article | Collation: | vol. 72 br. 11 str. 1127-1138 | DOI: | 10.2298/JSC0711127J | WoS-ID: | 000251108600011 | Scopus-ID: | 2-s2.0-35948959464 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/308 https://enauka.gov.rs/handle/123456789/202399 |
M-category: | 22M22 |
